Field Emission Scanning Electron Microscope (FE-SEM)
-
GeminiSEM 300 lets you experience high resolution and high contrast even on extremely large fields of view. Especially, but not solely, liked by novice users at high or low vacuum.
-
Image large fields of view with excellent image quality and fast-time-to-image.
-
Count on efficient detection, excellent resolution and distortion-free, large-area images.
-
Profit from the novel optical design’s high gun resolution mode that is tailored to low voltage imaging even for challenging samples, such as beam-sensitive or magnetic materials.
-
Characterize your sample comprehensively: obtain unique low voltage, material contrast with the energy selective backscatter detector.
-
Utilize the NanoVP mode: Image non-conductive specimens at high resolution with excellent surface sensitivity with the Inlens SE detector at higher pressures.
Technical Specifications ZEISS GeminiSEM 300
- Resolution: 0.6 nm @ 30 kV (STEM) ,0.7 nm @ 15 kv ,1.2 nm @ 1 kv, 1.1 nm @ 1kV TD
- Inlens BSE Resolution: 1.2 nm @ 1 kV
- Resolution in Variable Pressure mode (30 Pa) : 1.4 nm @ 3 kV and 1.0 nm @ 15 kv
- Acceleration Voltage: 0.02 - 30 kV
- Probe Current: 3 pA - 20 nA (100 nA configuration also available)
- Magnification: 12 – 2,000,000
- Electron Emitter: Thermal field emission type, stability better than 0.2 %/h
- Detectors available in basic configuration:
Inlens Secondary Electron detectorEverhart Thornley Secondary Electron detector
- Store Resolution:Up to 32k × 24k pixels
- Specimen Stage:
5-axes motorized eucentric specimen stageX = 130 mm; Y = 130 mmZ = 50 mmT = -4º to 70º , R = 360º
EDAX
Model:Octane Plus
Active Area: 30 mm2
Microscope/Port: Gemini 300/EDS
